一、概述 

       针座架设在真空腔体外侧，在不破坏温度及真空环境的情况下，随着元件的冷缩热膨，探针座可配合将探针做重复修改下针. 为消除来自于真空帮浦及地的震动，内置主动气浮式防震桌. 探针座最少2 组最多8 组，真空10exp-3  Torr 到10exp-6 Torr， 甚至提供腔体正压到达10atm，超低温达4.2K  ，超高温达1200°C。

二、特点

l Temperature range 77 degree K to 480 degree K ·Rugged Stucture with all frame welded

l Re-positioning the tip from outside micropositioner 

l Bridged-Frame Microscope with easily opening the chamber 

l Microsdope could be moved precisely by microscope stage X-Y 1"-1"

l Up to 6 micropositioners at a time 

l Optional 10pA leakage level 

l Optional Vibration free table 

l Optional high vacuum chamber

三、规格

l Chuck 40mm dia.77 degree K to 480 degree K 

l Temperature range Resolution 0.1 degree C 

l Liquid Nitrogen Dewar 50 liter

l Micropositioner travel X-Y-Z Linear 25mmx25mmx25mm Resolution 10 micron

四、选件

l Temperature Controll Module

For the temperature less than room temperature,the chuck has to be cooled down by liquid hitrogen to the temperature less than the preset one.PID controller will precisely control the temperature to the preset by heating up the heating element inside the chuck. 

l Liquid Nitrogen Module

Gas nitrogen is required to pressurize the dewar to push the liquid nitrogenout.

Tiquid Nitrogen volume could be controlted by gas nitrogen pressure, liquid nitrogen ihlet valve & liquid nitrogen outlet valve · Vacuum Chamber Module

The vacuum is generated to the rated 10-3 torr by vacuum pump for cryogenic application.

BNC Female feedthru is available for connecting the signal to the test instrument.

The vacuum Pump comes with exhaust filter to avoid the pollution to client environment.